Fluid control device

ABSTRACT

Provided is a fluid control device including: a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and a side surface adjacent to the installation surface; a heater that heats the body member; a heater holding member that has a facing surface facing the installation surface of the body member and holds the heater along the side surface with the facing surface made to face the installation surface; and a pressing mechanism that presses the facing surface toward the installation surface.

TECHNICAL FIELD

The present invention relates to a fluid control device.

BACKGROUND ART

As a conventional fluid control device, for example, as disclosed inPatent Literature 1, there has been one including: a block-shaped bodymember having inside a flow path through which fluid flows andrespective equipment installed on an installation surface of the bodymember to control the fluid flowing through the flow path.

In addition, the conventional fluid control device is structured toscrew a heater for heating the body member to a side surface adjacent tothe installation surface of the body member.

Meanwhile, this sort of fluid control device is generally installedtogether with other such fluid control devices. However, in this case,adjacent fluid control devices are arranged with side surfaces of bodymembers approximated to each other. For this reason, a heater ispositioned between the adjacent body members and consequently becomesdifficult to access, and therefore it has been very troublesome tomaintain the heater.

CITATION LIST Patent Literatures

Patent Literature 1: Japanese Unexamined Patent Application PublicationNo. 2016-119012

SUMMARY OF INVENTION Technical Problem

Therefore, the main object of the present invention is to obtain a fluidcontrol device that enables a heater arranged on a side surface of abody member to be easily detached and is superior in maintainability.

Solution to Problem

That is, the fluid control device according to the present invention isone including: a body member that is a block-shaped one having inside aflow path through which fluid flows and has an installation surface onwhich respective equipment for controlling the fluid flowing through theflow path is installed and a side surface adjacent to the installationsurface; a heater that heats the body member; a heater holding memberthat has a facing surface facing the installation surface of the bodymember and holds the heater along the side surface with the facingsurface made to face the installation surface; and a pressing mechanismthat presses the facing surface toward the installation surface.

Since such a fluid control device is structured so that the heaterholding member that is pressed by the pressing mechanism against theinstallation surface of the body member and thereby attached to theinstallation surface holds the heater along the side surface, the heaterholding member can be detached from the installation surface side of thebody member, which is relatively easily accessible even after integratedarrangement. This improves the maintainability of the heater. Inaddition, since the pressing mechanism presses the facing surface towardthe installation surface, the positional displacement of the heaterholding member with respect to the body member can be suppressed.

Also, the installation surface may be one including a first contact partthat contacts with the facing surface, the facing surface may be oneincluding a second contact part that contacts with the first contactpart, and at least one of the first contact part and the second contactpart may be one formed in a surface shape that is tilted with respect toa pressing direction of the pressing mechanism.

In addition, the first contact part and the second contact part may beones constituting a slide mechanism that interposes between theinstallation surface and the facing surface, and the slide mechanism maybe one that slides the heater holding member with respect to the bodymember with use of pressing by the pressing mechanism so that the heatermoves toward the side surface.

In such a configuration, between the installation surface and the facingsurface, the pressing by the pressing mechanism enables the heaterholding member to be slid with respect to the body member so that theheater moves toward the side surface, and therefore the heater can besurely brought into close contact with the side surface of the bodymember. This allows the heat of the heater to be efficiently transferredto the body member.

As a specific configuration of the slide mechanism, it is only necessarythat the slide mechanism is one including: the first contact partprovided on the installation part; and the second contact part providedon the facing surface and brought into contact with the first contactpart, and at least one of the first contact part and the second contactpart is configured to be formed in a surface shape that is tilted withrespect to the pressing direction of the pressing mechanism. Also, inthis case, the first contact part and the second contact part may beones configured to make a surface contact with each other.

In such a configuration, the slide mechanism capable of sliding theheater holding member with respect to the body member can be configuredwithout using a complicated structure.

Also, specific configurations of the heater holding member include onein which the heater holding member is one including: an attachment parthaving the facing surface; and a heater holding part that extends from afacing surface side of the attachment part along the side surface, andthe heater is provided on at least one of one surface of the heaterholding part, which faces the side surface, and the other surface on theside opposite to the one surface.

Further, the one surface of the heater holding member may be one tiltedfrom the facing surface toward the side surface.

In such a configuration, when the pressing mechanism presses the facingsurface toward the installation surface, the close contact can beachieved with at least part of the heater holding part biased toward theside surface.

Also, specific configurations of the pressing mechanism include one inwhich the pressing mechanism is one including: a screw hole provided inthe installation surface; a long hole that penetrates through theattachment part and extends in a direction away from the heater holdingpart; and a screw member that is screwed to the screw hole through thelong hole.

The fluid control device configured as described enables the heaterarranged on the side surface of the body member to be easily detachedfrom the installation surface side even after integrated arrangement,thus improving maintainability.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is an exploded perspective view schematically illustrating afluid control device according to a first embodiment;

FIG. 2 is a cross-sectional view schematically illustrating a statewhere a body member of the fluid control device according to the firstembodiment is cut in its longer direction;

FIG. 3 is an exploded cross-sectional view schematically illustrating astate where the body member of the fluid control device according to thefirst embodiment is cut in its width direction;

FIGS. 4(a) and 4(b) are cross-sectional views schematically illustratinga process of attaching a heater holding member to the body member of thefluid control device according to the first embodiment;

FIG. 5 is a cross-sectional view schematically illustrating a statewhere a body member of a fluid control device according to a secondembodiment is cut in its width direction;

FIGS. 6(a)-6(c) are cross-sectional views schematically illustrating aprocess of attaching a heater holding members to the body member of thefluid control device according to the second embodiment;

FIGS. 7(a) and 7(b) are cross-sectional views schematically illustratinga fluid control device of another embodiment according to the firstembodiment;

FIGS. 8(a) and 8(b) are cross-sectional views schematically illustratinga fluid control device of another embodiment according to the firstembodiment; and

FIG. 9 is a cross-sectional view schematically illustrating a fluidcontrol device of another embodiment according to the second embodiment.

DESCRIPTION OF EMBODIMENTS

In the following, the fluid control device according to the presentinvention will be described on the basis of the drawings.

The fluid control device according to the present invention is one thatis used incorporated in, for example, a semiconductor manufacturing lineor the like.

First Embodiment

As illustrated in FIGS. 1 and 2, a fluid control device 100 according tothe present embodiment includes: a body member 10 having inside a flowpath L through which fluid flows; respective equipment 20 that isinstalled on the body member 10 to control the fluid flowing through theflow path L; heaters 30 that heat the body member 10; and heater holdingmembers 40 that are attached to the body member 10 to hold the heaters30.

The body member 10 is a block-shaped one. Specifically, the body member10 is a rectangular parallelepiped member. In addition, the body member10 includes, on one end surface in a longer direction, an introductionport 10 a for introducing the fluid into the flow path L, as well asincludes, on the other end surface in the longer direction, a lead-outport 10 b for leading the fluid out of the flow path L.

In addition, the body member 10 is configured so that, with apredetermined surface extending in the longer direction as aninstallation surface S1, on the installation surface S1, the respectiveequipment 20 is installed and also the heater holding members 40 areattached. Also, the body member 10 includes, on the installation surfaceS1, a purge gas introduction port 10 c for introducing purge gas intothe flow path L.

The respective equipment 20 is one that controls the fluid flowingthrough the flow path L. Specifically, the respective equipment 20 inthe present embodiment includes: a first pneumatic valve 20 a;preheating tank 20 b, first flow rate regulation valve 20 c, heatingtank 20 d, pressure sensor 20 e, second pneumatic valve 20 f, thirdpneumatic valve 20 g, second flow rate regulation valve 20 h, and flowrate sensor 20 i. In addition, these respective pieces of equipment 20are installed on the installation surface S1 of the body member 10 inthis order from the upstream side toward the downstream side of the flowpath L.

Further, the respective equipment 20 in the present embodiment isconfigured to, while the first flow rate regulating valve 20 c isregulating the flow rate of liquid material introduced from theintroduction port 10 a, heat the liquid material in the preheating tank20 b and in the heating tank 20 d to produce material gas, and afterfeedback control of the flow rate of the material gas is performed usingthe second flow rate regulation valve 20 h so that a measured value ofthe flow rate sensor 20 i comes close to a set value, lead the materialgas out of the lead-out port 10 b.

The heaters 30 are flat plate-shaped ones. As the heaters 30, forexample, rubber heaters can be used.

The heater holding members 40 are ones that are attached on theinstallation surface S1 of the body member 10 and hold the heaters 30along the side surfaces S2 adjacent to the installation surface S1 ofthe body member 10. Here, the side surfaces S2 are surfaces adjacent tothe installation surface S1 of the body member 10 along the longerdirection, and the side surfaces S2 in the present embodiment areorthogonal to the installation surface S1. In addition, the presentembodiment is structured to attach the two heater holding members 40 tothe body member 10, and both the heater holding members 40 are symmetricin structure and their attachment structure with respect to thecenterline a extending in the longer direction of the body member 10,and therefore in the following, the structure will be described with afocus on one of the heater holding members 40.

Specifically, the heater holding member 40 includes: paired attachmentparts 40 a respectively having facing surfaces 40 s facing theinstallation surface S1 of the body member 10; and a heater holding part40 b laid across the respective attachment parts 40 a. In addition, asillustrated in FIG. 3, the heater holding part 40 b extends along theside surface S2 of the body member 10 with the facing surfaces 40 s ofthe paired attachment parts 40 a facing the installation surface S1.Also, the heater holding member 40 is configured so that the facingsurface 40 s of each of the attachment parts 40 a is pressed toward theinstallation surface S1 by a pressing mechanism 50. The heater holdingmember 40 in the present embodiment includes the two attachment parts 40a, but may be one including one or three or more attachment parts 40 a.

In addition, the heater 30 is provided on one surface 40 x of the heaterholding part 40 b, which faces the side surface S2, and on the othersurface 40 y on the other side. The heater 30 may be provided on the onesurface 40 x of the heater holding part 40 b or on both of the onesurface 40 x and the other surface 40 y.

The pressing mechanism 50 is one that presses the facing surface 40 stoward the installation surface S1. Specifically, the pressing mechanism50 includes: a screw hole 50 a provided in the installation surface S1of the body member 10; a long hole 50 b that penetrates through theattachment part 40 a of the heater holding member 40 and extends in adirection away from the heater holding part 40 b (in a directionintersecting with the one surface 40 x); and a bolt-like screw member 50c that is screwed to the screw hole 50 a through the long hole 50 b. Inaddition, the screw member 50 c has a shaft part 50 x that passesthrough the long hole 50 b and a head part 50 y that does not passthrough the long hole 50 b.

Further, the pressing mechanism 50 is configured to, by screwing thescrew member 50 c into the screw hole 50 a, allow the head part 50 y ofthe screw member 50 c caught by the long hole 50 b to press the facingsurface 40 s of the attachment part 40 a toward the installation surfaceS1.

In addition, a slide mechanism 60 interposes between the facing surface40 s and the installation surface S1. The slide mechanism 60 is one thatslides the heater holding member 40 with respect to the body member 10with use of the pressing by the pressing mechanism 50 so that the heater30 held by the heater holding member 40 b moves toward the side surfaceS2 side.

Specifically, the slide mechanism 60 is one including: a first contactpart 60 a provided on the installation surface S1; and a second contactpart 60 b provided on the facing surface 40 s. In addition, the firstcontact part 60 a is configured of a part of the installation surfaceS1, which is in contact with the facing surface 40 s, and for example, apart of a surface shape or a protrusion shape. Also, the second contactpart 60 b is configured of a part of the facing surface 40 s, which isin contact with the installation surface S1, and for example, a part ofa surface shape or a protrusion shape. Further, the first contact part60 a and the second contact part 60 b are configured to slidably contactwith each other when the facing surface 40 s is pressed toward theinstallation surface S1 by the pressing mechanism 50.

As illustrated in FIG. 3, the first contact part 60 a and the secondcontact part 60 b in the present embodiment are formed in a surfaceshape (specifically a planar surface shape) tilted with respect to thepressing direction X of the pressing mechanism 50. In addition, thefirst contact part 60 a and the second contact part 60 b are configuredto make a surface contact with each other. Further, the surfaceconfiguring the first contact part 60 a is tilted so that an angle θ1formed with the side surface S2 is an acute angle. Also, the surfaceconfiguring the second contact part 60 b is tilted so that an angle θ2formed with the one surface surface 40 x is an acute angle. In addition,the side surface S2 is a surface faced by the heater 30 held by theheater holding member 40 that is attached on the installation surface S1by bringing the first contact part 60 a and the second contact part 60 binto contact with each other. Incidentally, the surface configuring thefirst contact part 60 a is tilted so as to face in a direction (theright direction in FIG. 3) opposite to a direction (the left directionin FIG. 3) in which the side surface S2 faces, and the surfaceconfiguring the second contact part 60 b is tilted so as to face in adirection (the left direction in FIG. 3) opposite to a direction (theright direction in FIG. 3) in which the one surface 40 x faces. In otherwords, in a state where the first contact part 60 a and the secondcontact part 60 b are in contact with each other, the surfaceconfiguring the second contact part 60 b is tilted so as to face in thesame direction as the direction (the left direction in FIG. 3) in whichthe side surface S2 faces. That is, it is only necessary that, in thestate where the first contact part 60 a and the second contact part 60 bare in contact with each other, at least one of them is formed in asurface shape tilted with respect to the pressing direction X of thepressing mechanism 50, and when the first contact part 60 a is formed ina surface shape, the surface is tilted so as to face in the directionopposite to the direction in which the side surface S2 faces, whereaswhen the second contact part 60 b is formed in a surface shape, thesurface is tilted so as to face in the same direction as the directionin which the side surface S2 faces (in the direction opposite to thedirection in which the one surface 40 x faces).

In addition, at least one of the first contact part 60 a and the secondcontact part 60 b only has to be formed in a surface shape tilted withrespect to the pressing direction X of the pressing mechanism 50, andthey may be configured so that the other makes a point contact or linecontact with the one surface. In this case, it is preferable that thefirst contact part 60 a and the second contact part 60 b are configuredto contact with each other at two or more points.

Also, in the state where the first contact part 60 a and the secondcontact part 60 b are in contact with each other, the heater holdingpart 40 b is such that the one surface 40 x is parallel to the sidesurface S2 or the one surface 40 x is tilted from the facing surface 40s toward the side surface S2 side.

In addition, the body member 10 in the present embodiment is providedwith the first contact part 60 a in each of spaces on the installationsurface S1 between the pressure sensor 20 e and the second pneumaticvalve 20 f and between the third pneumatic valve 20 g and the secondflow rate regulation valve 20 h.

Next, a method for attaching the heater holding member 40 to the bodymember 10 in the present embodiment will be described on the basis ofFIGS. 4(a) and 4(b).

First, as illustrated in FIG. 4(a), the heater holding member 40 isarranged so that the facing surface 40 s faces the installation surfaceS 1. Then, the first contact part 60 a and the second contact part 60 bare brought into contact with each other.

Subsequently, the shaft part 50 x of the screw member 50 c is screwed tothe screw hole 50 through the long hole 50 b. After that, by screwingthe screw member 50 c into the screw hole 50 a, the head 50 y of thescrew member 50 c presses the attachment part 40 a to press the secondcontact part 60 b toward the first contact part 60 a.

This causes sliding between the first contact part 60 a and the secondcontact part 60 b as illustrated in FIG. 4(b). As a result, the heaterholding member 40 slides with respect to the body member 10. Then, theheater 30 held by the heater holding part 40 b indirectly closelycontacts with the side surface S2 via the heater holding member 40 b.

Second Embodiment

As illustrated in FIGS. 5 and 6, a fluid control device 100 according tothe present embodiment includes: a body member 10 having inside a flowpath L through which fluid flows; respective equipment 20 that isinstalled on the body member 10 to control the fluid flowing through theflow path L; heaters 30 that heat the body member 10; and a holdingmechanism M that holds the heater 30 while bringing the heaters 30 intoclose contact with the body member 10.

The body member 10 is a block-shaped one. Specifically, the body member10 is a rectangular parallelepiped member. Also, the body member 10includes an installation surface S1 extending in a longer direction, andpaired side surfaces S2 extending in the longer direction and adjacentto the installation surface S1. In addition, the body member 10 isconfigured so that the respective equipment 20 is installed on theinstallation surface S1. Accordingly, the paired side surfaces S1 facein mutually opposite directions.

The holding mechanism M includes paired heater holding plates 70, alocking structure 80, and a connecting structure 90.

The paired heater holding plates 70 are ones that face correspondingones of the side surfaces S2 of the body member 10 to hold the heaters30 with the side surfaces S2. For example, the heater holding plates 70are ones formed by folding an elastic plate material.

Specifically, the heater holding plates 70 respectively include: holdingparts 71 that extend along the side surfaces S2 of the body member 10;hooking parts 72 that are formed at one end parts extending from theholding parts 71 in a direction opposite to a direction X (the upperdirection in FIG. 5) in which the installation surface S1 of the bodymember 10 faces; and facing parts 73 that are formed at the other endparts extending from the holding parts 71 in the direction X in whichthe installation surface S1 faces. Also, the heater holding plates 70are configured to sandwich and hold the heaters 30 between the holdingparts 71 and the side surfaces S2. In addition, in other words, thedirection in which the installation surface S1 faces can also be said tobe the upright direction of the respective equipment 20 installed on theinstallation surface S1.

Specifically, the holding parts 71 extend facing the body member 10 andthe respective equipment 20 installed on the installation surface S1 ofthe body member 10. Further, the holding parts 71 are attached with theheaters 30 on the inner surfaces thereof facing the side surfaces S2.The hooking parts 72 are formed by folding the one end parts of theheater holding plates 70 in a downward L-shape. Also, the facing parts73 are formed by folding the other end parts of the heater holdingplates 70 at a right angle, and configured so as to face theinstallation surface S1. In addition, the facing parts 73 are formedwith through-holes 73 h constituting the connecting structure 90.

The locking structure 80 is one that is provided to the body member 10to lock the one end parts of the paired heater holding plates 70.Specifically, the locking structure 80 is formed in an elongatedrectangular shape extending along the opposite surface S3 to theinstallation surface S1 of the body member 10, and includes: a plate 81formed to have a wider width than the opposite surface S3; and lockingpieces 82 that rise from both sides extending in the longer direction ofthe plate 81 and face the side surfaces S2 of the body member 10.

The plate 81 is fixed to the opposite surface S3 of the body member 10.The locking pieces 82 extend along the side surfaces S2 of the bodymember 10, and also include locking surfaces 82 s facing the sidesurfaces S2. Also, the distance between the locking surfaces 82 s andcorresponding ones of the side surfaces S2 is set to a distance that isthe same as or shorter than the thickness of the heaters 30. Inaddition, the locking structure 80 may be configured of membersdifferent from the body member 10 as in the present embodiment, or maybe provided integrally with the body member 10.

The connecting structure 90 is one that mutually connects the other endparts of the paired heater holding plates 70, which extend in thedirection in which the installation surface S1 faces. Specifically, theconnecting structure 90 includes: the through-holes 73 h formed in thefacing parts 73; a connecting plate 91 laid between the respectivefacing parts 73; and screws 92 screwed to the connecting plate 91through the through-holes 73 h. The connecting structure 90 is adaptedto mutually connect the facing parts 73 formed at the other end parts ofthe paired heater holding plates 70 in a position facing theinstallation surface S1 and interposing the respective equipment 20installed on the installation surface S1.

Further, the paired heater holding plates 70 are configured to bend inmutually facing directions in a state where the hooking parts 72 (theone end parts) are locked by the locking structure 80 and the facingparts 73 (the other end parts) are connected by the connecting structure90. This allows the heaters 30 to be brought into a state of beingpressed toward the side surfaces S2 by the elasticity of the bent heaterholding plates 70.

Also, the heater holding plates 70, the plate 81, and the connectingplate 91 are all such that length in the longer direction is the same asor longer than the length of the body member 10 in the longer direction.In doing so, the holding mechanism M is adapted to, while holding theheaters 30 on the side surfaces S2 of the body member 10, configure ahousing that houses inside the body member 10 and the respectiveequipment 20.

Next, an assembly procedure for the fluid control device 100 accordingto the present embodiment will be described.

First, as illustrated in FIG. 6(a), the plate 81 constituting thelocking structure 80 is fixed to the opposite surface S3 to theinstallation surface S1 of the body member 10. In this case, the lockingpieces 82 are arranged separated from the side surfaces S2 of the bodymember 10. Then, the hooking parts 72 of the paired heater holdingplates 70 are inserted between the locking surfaces 82 s and the sidesurfaces S2 and locked to the locking pieces 82. Subsequently, asillustrated in FIG. 6(b), with locking positions to the locking pieces82 as pivot points, the paired heater holding plates 70 are rotated topositions where the holding parts 71 are substantially parallel to theside surfaces S2. In doing so, the heaters 30 are pressed against theside surfaces S2 by the elasticity of the heater holding plates 70 andbrought into a state of closely contacting with the side surfaces S2 ofthe body member 10. Finally, as illustrated in FIG. 6(c), the facingparts 73 of the paired heater holding plates 70 are mutually connectedby the connecting structure 90. Specifically, the paired heater holdingplates 70 are connected by screwing the screws 92 passed through thethrough-holes 73 h of the facing parts 73 to the connecting plate 91. Indoing so, the heaters 30 are sandwiched between the holding parts 71 ofthe heater holding plates 70 and the side surfaces S2 of the body member10, and held in the state of closely contacting with the side surfacesS2.

In such a configuration, since the heater holding plates 70 hold theheaters 30 while pressing the heaters 30 against the side surfaces S2 bytheir elastic restoring forces, the heaters 30 can be brought into closecontact with the body member 10. This allows the heat of the heaters 30to be efficiently transferred to the body member 10. Also, since theholding mechanism M can also serve as the housing that houses the bodymember 10 and the respective equipment 20, the need to separatelyproviding the body member 10 with dedicated parts for holding theheaters 30 is eliminated, making it possible to reduce the number ofparts. Further, since the facing parts 73 of the paired heater holdingplates 70, which face the installation surface S1, are configured to beconnected to each other by the connecting structure 90, the connectionbetween both the heater holding plates 70 by the connecting structure 90can be released from the installation surface S1 side of the body member10.

In addition, the locking structure 80 may also be another structure, andfor example, may be a structure fixed to the side surfaces S2 of thebody member 10. Also, the present embodiment is configured to lock theheater holding plates 70 to the locking pieces 82 provided to the plate81, but, for example, may be configured to lock the heater holdingplates 70 to locking holes provided in the plate 81. Further, theconnecting structure 90 may be another structure, and for example, maybe a structure provided with hooks that mutually engage with the otherend parts of the paired heater holding plates 70.

Other Embodiments

As illustrated in FIG. 7(a), as another embodiment according to thefirst embodiment, the heater holding member 40 may be configured so thatthe one surface 40 x of the heater holding part 40 b is tilted from thefacing surface 40 s toward the side surface S2 side. In such aconfiguration, when the facing surface 40 s is pressed toward theinstallation surface S1 by the pressing mechanism 50, at least part ofthe heater holding part 40 b is biased toward the side surface S2,increasing a force to closely contact with the side surface S2.

Also, in the above-described first embodiment, the heater holding member40 includes one member; however, as illustrated in FIG. 7(b), the heaterholding member 40 may be configured of multiple members (two members inFIG. 7(b)). In addition, similarly, in the above-described embodiments,the body member 10 is configured of one member, but may be configured ofmultiple members.

Further, in the above-described first embodiment, the first contact part60 a and the second contact part 60 b are respectively configured inparallel planar surface shapes, but as illustrated in FIG. 8(a), may berespectively configured in parallel curved shapes.

In addition, as illustrated in FIG. 8(b), at least one of theinstallation surface S1 and the facing surface 40 s may be provided witha contact surface CS1, CS2 orthogonal to the pressing direction Xseparately from the first contact part 60 a and the second contact part60 b. Such a configuration enables the contact between the contactsurfaces CS1 and CS2 to restrict the pressing by the pressing mechanism50, as well as enables the facing surface 40 s to be positioned withrespect to the installation surface S1.

Also, in the above-described first embodiment, the heater holding member40 is configured to be attached to the installation surface S1 of thebody member 10, but may be configured to be attached to the oppositesurface to the installation surface S1 (to the lower surface whendefining the installation surface S1 as the upper surface of the bodymember 10).

Further, in the above-described first embodiment, the other surface 40 yof the heater holding part 40 b is provided with the heater 30; however,the one surface 40 x of the heater holding part 40 b may be providedwith the heater 30 and the other surface 40 y may be provided with aheat insulating material. Such a configuration allows the heat of theheater 30 to be more efficiently transferred to the body member 10.

In addition, as another embodiment according to the first embodiment,between the first contact part 60 a and the second contact part 60 b, awasher member whose friction resistance is lower than those of the firstcontact part 60 a and second contact part 60 b may be interposed.Further, on the surface of the first contact part 60 a, a material whosefriction resistance is lower than that of the first contact part 60 amay be stacked, and on the surface of the second contact part 60 b, amaterial whose friction resistance is lower than that of the secondcontact part 60 b may be stacked. Such a configuration allows the heaterholding member 40 to be easily slid with respect to the body member 10,improving workability. Further, it is also possible to prevent materialfrom being firmly fixed to the first contact part 60 a and the secondcontact part 60 b.

In addition, the above-described second embodiment is structured tomutually connect the other end parts of the paired heater holding plates70 by the connecting structure 90, but may be structured to connect theother end parts (facing parts 73) of the heater holding plates 70 to thebody member 10 (specifically, to the installation surface S1 of the bodymember 10) by the connecting structure 90. In this case, it is onlynecessary that the connecting structure 90 is configured to include: forexample, the through-holes 73 h formed in the facing parts 73, screwholes 10 h provided in the installation surface S1 of the body member10; and screws 92 screwed to the screw holes 10 h through thethrough-holes 73 h.

Besides, it goes without saying that the present invention is notlimited to each of the above-described embodiments, but can be variouslymodified without departing from the scope thereof.

LIST OF REFERENCE CHARACTERS

100: Fluid control device

10: Body member

S1: Installation surface

S2: Side surface

20: Respective equipment

30: Heater

40: Heater holding member

40 a: Attachment part

40 s: Facing surface

40 b: Heater holding part

40 x: One surface

40 y: The other surface

50: Pressing mechanism

50 a: Screw hole

50 b: Long hole

50 c: Screw member

60: Slide mechanism

60 a: First contact part

60 b: Second contact part

M: Holding mechanism

70: Heater holding plate

80: Locking structure

90: Connecting structure

1. A fluid control device comprising: a body member that is ablock-shaped one having inside a flow path through which fluid flows andhas an installation surface on which respective equipment forcontrolling the fluid flowing through the flow path is installed and aside surface adjacent to the installation surface; a heater that heatsthe body member; a heater holding member that has a facing surfacefacing the installation surface of the body member and holds the heateralong the side surface with the facing surface made to face theinstallation surface; and a pressing mechanism that presses the facingsurface toward the installation surface.
 2. The fluid control deviceaccording to claim 1, wherein the installation surface is one includinga first contact part that contacts with the facing surface, the facingsurface is one including a second contact part that contacts with thefirst contact part, and at least one of the first contact part and thesecond contact part is formed in a surface shape that is tilted withrespect to a pressing direction of the pressing mechanism.
 3. The fluidcontrol device according to claim 2, wherein the first contact part andthe second contact part are ones constituting a slide mechanism thatinterposes between the installation surface and the facing surface, andthe slide mechanism is one that slides the heater holding member withrespect to the body member with use of pressing by the pressingmechanism so that the heater moves toward the side surface.
 4. The fluidcontrol device according to claim 2, wherein the first contact part andthe second contact part are configured to make a surface contact witheach other.
 5. The fluid control device according to claim 1, whereinthe heater holding member is one comprising: an attachment part havingthe facing surface; and a heater holding part that extends from a facingsurface side of the attachment part along the side surface, and theheater is provided on at least one of one surface of the heater holdingpart and the other surface on a side opposite to the one surface, theone surface facing the side surface.
 6. The fluid control deviceaccording to claim 5, wherein the one surface of the heater holdingmember is tilted from the facing surface toward the side surface.
 7. Thefluid control device according to claim 5, wherein the pressingmechanism is one comprising: a screw hole provided in the installationsurface; a long hole that penetrates through the attachment part andextends in a direction away from the heater holding part; and a screwmember that is screwed to the screw hole through the long hole.
 8. Afluid control device comprising: a body member that is a block-shapedone having inside a flow path through which fluid flows and has aninstallation surface on which respective equipment for controlling thefluid flowing through the flow path is installed and paired sidesurfaces adjacent to the installation surface; heaters arranged alongthe respective side surfaces; and a holding mechanism that holds theheaters while bringing the heaters into close contact with the sidesurfaces, wherein the holding mechanism comprises: paired heater holdingplates that face corresponding ones of the side surfaces of the bodymember and hold the heaters with the side surfaces; a locking structurethat is provided to the body member and locks one end parts of thepaired heater holding plates, the one end parts extending in a directionopposite to a direction in which the installation surface faces; and aconnecting mechanism that mutually connects the other end parts of thepaired heater holding plates, the other end parts extending in thedirection in which the installation surface faces, and the heaters areconfigured to be held brought into close contact with the side surfacesby locking the one end parts of the paired heater holding plates to thelocking structure and mutually connecting the other end parts by theconnecting mechanism.
 9. A fluid control device comprising: a bodymember that is a block-shaped one having inside a flow path throughwhich fluid flows and has an installation surface on which respectiveequipment for controlling the fluid flowing through the flow path isinstalled and paired side surfaces adjacent to the installation surface;heaters arranged along the side surfaces; and a holding mechanism thatholds the heaters while bringing the heaters into close contact with theside surfaces, wherein the holding mechanism comprises: heater holdingplates that face the side surfaces of the body member and hold theheaters with the side surfaces; a locking structure that is provided tothe body member and locks one end parts of the heater holding plates,the one end parts extending in a direction opposite to a direction inwhich the installation surface faces; and a connecting mechanism thatconnects the other end parts of the heater holding plates to the bodymember, the other end parts extending in the direction in which theinstallation surface faces, and the heaters are configured to be heldbrought into close contact with the side surfaces by locking the one endparts of the paired heater holding plates to the locking structure andconnecting the other end parts to the installation surface by theconnecting mechanism.